| 摘要 |
<p>PURPOSE:To improve product yield, by preventing a contaminant adhering to the last (edge-part) one of wafers that are stored in a semiconductor wafer cassette. CONSTITUTION:A semiconductor wafer cassette is so constituted that the last wafer is positioned in the same way as the other wafers, narrowing the space between the last wafer and one U-shaped face of the cassette. Consequently, an impurity hardly adheres to the last wafer and production yield can be improved.</p> |
