| 摘要 |
PURPOSE:To prevent the deterioration of laser beam quality and the damages of substrate due to thermal strain by providing a first parabolic mirror to enter the laser light accompanied with inductive discharge into a convex lens and to reflect the laser light reflected/oscillated on a concave lens, and a second parabolic mirror to reflect the light of enlarged beam diameter to a beam pick-up window. CONSTITUTION:The laser light accompanied with the inductive discharge of carbonic acid gas that is excited in a discharge exciting section 4 enters a concave mirror 2 and succesively enters a convex mirror 3 through a transmission hole of a first parabolic mirror 15. Then only part of laser light entering the optical axes of the mirrors 2 and 3 and its periphery reflects reciprocatively and is oscillated to enter the mirror 15. Further the reflected laser light scatters and enters a second parabolic mirror 16 which is placed at common-focus point, then the light of enlarged diameter reflects again to go out in the air through a beam pick-up window 6. Therefore, the outgoing laser light can be prevented from quality deterioration such as non-parallel beam flux and phase dispalcement, and the damages of substrate due to thermal strain. |
