发明名称 ADHESIVE SHEET FOR DICING OF SEMICONDUCTOR WAFER
摘要 <p>PURPOSE:To provide an adhesive sheet for preventing circuits formed on the surface of a wafer from damage due to static electricity caused by cutting water or cleaning water jetted under high pressure when the semiconductor wafer is diced or cleaned. CONSTITUTION:An adhesive sheet for a semiconductor wafer includes an adhesive layer on a surface substrate made of a layer consisting of at least internal plasticized polyvinyl chloride film with a low electrical resistance.</p>
申请公布号 JPH05175331(A) 申请公布日期 1993.07.13
申请号 JP19910325039 申请日期 1991.11.14
申请人 NIPPON KAKOH SEISHI KK 发明人 OCHIAI TOSHIO;ONOSE YUTAKA;SASAKI KAZUHARU
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
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