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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05175188(A)
申请公布日期
1993.07.13
申请号
JP19910343750
申请日期
1991.12.26
申请人
FUJI ELECTRIC CO LTD
发明人
YONEYAMA KAZUYASU
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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