发明名称 ACTIVE MATRIX SUBSTRATE
摘要 <p>PURPOSE:To improve the active matrix substrate used for an active matrix type liquid crystal display device. CONSTITUTION:In the active matrix substrate 1 in which a picture element part 2 containing a thin film transistor as a switch and peripheral circuit parts 31, 32 constituted by containing the thin film transistor are formed on the substrate 1, the thin film transistor of the picture element part 2 consists of an offset structure or an LDD structure, and the thin film transistor of the peripheral circuit parts 31, 32 consists of a structure in which end parts of source and drain areas 6S, 6D and an end part of a gate electrode are matched or superposed to each other. Since the thin film transistor of the picture element part 2 consists of the offset structure or the LDD structure, a turn-off current can be reduced, and on the other hand, since the thin film transistor of the peripheral circuit parts 31, 32 consists of a regular structure (structure in which the gate electrode 8 and the source and the drain areas 6S, 6D are matched or superposed to each other), a fall of the turn-on current can be prevented.</p>
申请公布号 JPH05173179(A) 申请公布日期 1993.07.13
申请号 JP19910343013 申请日期 1991.12.25
申请人 SEIKO EPSON CORP 发明人 INOUE SATOSHI
分类号 G02F1/136;G02F1/1368;G09F9/30;H01L21/336;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/136
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