METHOD FOR FORMING TITANIUM COMPOUND FILM,申请号JP19910355544-传众专利搜索

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发明名称	METHOD FOR FORMING TITANIUM COMPOUND FILM
摘要
申请公布号	JPH05175157(A)	申请公布日期	1993.07.13
申请号	JP19910355544	申请日期	1991.12.24
申请人	SONY CORP	发明人	MINEGISHI SHINJI
分类号	H01L21/285;H01L21/28;H01L21/3205	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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