| 摘要 |
<p>PURPOSE: To provide a temperature control system which uses a liquefied gas as a coolant and from which the well known disadvantages of the system, such as the short service life of solenoid valves, deterioration of the temperature control, and occurrence of noise are eliminated. CONSTITUTION: A coolant is supplied to a chamber 2 and a discharge port 11B through different solenoid valves 1 and 5. In an initial cooling stage, the valves 1 and 5 are opened to pass the coolant at the maximum flow rate and, after a desired low temperature is attained, the flow rate of the coolant is reduced by intermittently opening and closing the valves 1 and 5 so as to maintain the low temperature.</p> |
