发明名称 FIXING STRUCTURE OF WAVEGUIDE AND PHOTODETECTOR
摘要 PURPOSE:To make a structure capable of mass production. CONSTITUTION:An Si substrate 20 just near the light emission end of a waveguide is provided with a guide groove 24 and an electrode 25 to fix a photodetector 23. This guide groove 24 has its inner diameter worked slightly larger than the outer diameter of the photodetector 23. The depth or the position of this guide groove 24 are so set that emitted light from the waveguide may fall into the center of the photo receiving plane 26 of the photodetector 23 when the photodetector 23 is inserted to fix into the guide groove 24. Mechanically inserting the photodetector 23 into this guide groove 24 can realize high- efficiency coupling without optical axis adjustment.
申请公布号 JPH05175523(A) 申请公布日期 1993.07.13
申请号 JP19910340751 申请日期 1991.12.24
申请人 NEC CORP 发明人 SAKUKAI MASASHI
分类号 G02B6/122;G02B6/12;G02B6/42;H01L31/0232 主分类号 G02B6/122
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