NEGATIVE-WORKING RADIATION-SENSITIVE MIXTURE, AND RADIATION-SENSITIVE RECORDING MATERIAL PRODUCED WITH THIS MIXTURE

摘要

A negative-working radiation-sensitive mixture containing a) a compound which generates a strong acid under the action of actinic radiation, b) a compound having at least two groups crosslinkable by means of acid and c) a polymeric binder which is insoluble in water and soluble or at least swellable in aqueous alkaline solutions, wherein the compound (a) contains a 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine which is esterified with two or three arylsulfonic acids or heteroarylsulfonic acids, is distinguished by high resolution and high sensitivity over a wide spectral range. It also shows high thermal stability and does not form any corrosive photolysis products on exposure. A radiation-sensitive recording material which has been produced with this mixture is suitable for the production of photoresists, electronic components, printed plates or for chemical milling.