| 摘要 |
<p>PURPOSE:To prevent local discharge when a semiconductor substrate is detached from or attached to an electrostatic chuck in a structure of the chuck for holding the substrate. CONSTITUTION:A structure of a lift pin 4 having a function for detaching or attaching a substrate 1 from or to an electrostatic chuck 2 to protrude from a through hole 3 provided in an attraction region for the substrate 1 is formed of a conductor 6 covered on an outer periphery with an insulator 5. When the substrate 1 is detached from or attached to the chuck 2, substantially the same potential as that charged on the substrate 1 is so applied to the conductor 6 as to store the charge of the same type as that charged on the substrate 1 on the insulator 5.</p> |
