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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH05175171(A)
申请公布日期
1993.07.13
申请号
JP19910355215
申请日期
1991.12.20
申请人
NIPPON STEEL CORP
发明人
SUZUKI YASUHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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