DEVICE FOR CLEANING PLASMA-ARC EVAPORATOR FROM MICROPARTICLES (OPTIONS)

摘要

FIELD: maintenance of plasma-arc evaporators. SUBSTANCE: device is made as louver-type set of electrodes placed on plasma current path and connected to anode of arc evaporator. Electrodes are interconnected in series and in opposition and connected to current supply. Set of electrodes may be optionally made as nonaxial set of conical electrodes. EFFECT: improved design. 2 cl, 2 dwgc