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发明名称
METHOD FOR DETECTING END POINT OF ION BEAM ETCHING
摘要
申请公布号
JPH05171472(A)
申请公布日期
1993.07.09
申请号
JP19910345168
申请日期
1991.12.26
申请人
NIKON CORP
发明人
SHIMIZU SUMUTO
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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