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发明名称
摘要
申请公布号
JP2766315(B2)
申请公布日期
1998.06.18
申请号
JP19890144254
申请日期
1989.06.08
申请人
KYANON KK
发明人
YAMAGATA KENJI;KOMATSU TOSHUKI
分类号
H01L21/20;H01L21/324;(IPC1-7):H01L21/20
主分类号
H01L21/20
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