| 摘要 |
PURPOSE:To obtain the subject method and device capable of quick detection of two dimensional inside information of the sample, regarding a light and sound signal detection technology without having little influence by reflection index and unduration distribution of the sample surface. CONSTITUTION:Optoacoustic signal from a sample in a band shaped inspection region are detected simultaneously and in parallel, by making constitutions 201 and 202 by which the band shaped inspection region of the sample is excited simultaneously in parallel by stripe shaped excitation beams 101, and interfered light beams are detected simultaneously and in parallel by utilizing optical interference generated at each point. Since simultaneous and parallel detection of the light and sound signal in the band shaped inspection region of the sample becomes possible, quick detection of two dimensional surface and inside information of the sample can be well performed. Also, detection of the light and sound signal of which fluctuation by reflection index distribution and unduration distribution of the sample surface, and light beam pass, are well corrected, becomes possible, and therewith highly sensitive and stable detection can be performed. |
