| 摘要 |
PROBLEM TO BE SOLVED: To execute alignment of a board without lowering through put while maintaining desired alignment accuracy by processing an image by a template matching method, and setting frequency of fetching of an image of an alignment mark according to obtained resemblance. SOLUTION: An image of alignment marks 7, 8 of a mask 1 and a plate 3 is imaged by a CCD camera 16 and fed to an image processing unit 19. In the image processing unit 19, resemblance RM of the mask 1 is found by a template matching method by using a template of the mask 1 to a picked-up image and a position wherein resemblance RM is minimum is detected as a mark position of the alignment mark 7 of the mask 1. It is judged whether or not a value of the found resemblance RM of the mask 1 is larger than 20; if a value of resemblance is not more than 20, it is judged that a mark position of the alignment mark 7 of the mask 1 is detected with a predetermined accuracy. |
