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发明名称
摘要
申请公布号	JPH0545286(B2)	申请公布日期	1993.07.08
申请号	JP19840229209	申请日期	1984.10.31
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	INAMURA NOBORU;TANIGUCHI YOSHIHARU
分类号	B01D59/34;H01L21/203;H01S3/00;(IPC1-7):B01D59/34	主分类号	B01D59/34
代理机构		代理人
主权项
地址

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