| 摘要 |
Apparatus for measuring a characteristic of motion and methods for its manufacture are disclosed in which a sensor structure includes a support structure, and a mass suspended from such support structure by a spring connecting arrangement and electrical devices for measuring displacement of the mass which results from a force applied to the support structure. An apparatus is provided where the mechanical spring constant of the connecting arrangement of the sensor structure is provided to be a high value representative of a strong, stiff spring which resists breaking due to high forces applied to it, and where an electric spring constant is provided to yield a small effective sensor spring constant Keff=Km-Ke. Methods are also provided to manufacturing the apparatus by specifying the mechanical spring constant and providing an electric spring constant which will yield a desired effective spring constant which produces a desired characteristic of the sensor structure. Alternatively, the apparatus may be manufactured by specifying the electric spring constant which, with a mechanical spring constant, provides a certain sensor structure characteristic, e.g., natural frequency, and then providing a connecting arrangement characterized by a mechanical spring constant which yields such sensor characteristic. According to another aspect of the invention, the sensing force applied to the mass is adjusted in coordination with the mechanical spring constant and damping factor of the apparatus so that a desired characteristic of the apparatus is achieved.
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