发明名称 |
IMPURITY MEASURING METHOD |
摘要 |
<p>An object (10) to be measured is driven, and a stick (11) prepared by cooling and solidifying a solution into a rod-like shape is brought into contact with the surface of the object (10) to be measured, thereby dissolving a natural oxide film and the like formed on the surface of the object (10). After the stick (11) is brought into contact with the overall surface of the object to be measured, the solution (13) held at a distal end portion of the stick (11) is analyzed by chemical analysis to measure the type and amount of an impurity adhered on the surface of the object (10).</p> |
申请公布号 |
EP0339561(B1) |
申请公布日期 |
1993.07.07 |
申请号 |
EP19890107448 |
申请日期 |
1989.04.25 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KAGEYAMA, MOKUJI INTELLECTUAL PROPERTY DIVISION;MAEDA, AYAKO C/O INTELLECTUAL PROPERTY DIVISION |
分类号 |
G01N1/28;G01N1/02;G01N1/04;G01N31/00;H01L21/66 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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