BOX FOR TRANSFERRING SEMICONDUCTOR WAFER,申请号WO1998JP05369-传众专利搜索

发明名称	BOX FOR TRANSFERRING SEMICONDUCTOR WAFER
摘要	A box (21) for transferring a semiconductor wafer, having an opening/closing mechanism for putting in/taking out a wafer, characterized by comprising a gas cleaning device A-2 which uses photoelectrons produced by irradiation with light and an optical catalyst for cleaning the interior of the box, or a gas cleaning unit which includes the gas cleaning device and a battery-mounted power source device with a function of charging the battery for supplying electric power to the gas cleaning device. Thus, the box has a practically effective function of removing fine particles and gaseous harmful components.
申请公布号	WO9928967(A1)	申请公布日期	1999.06.10
申请号	WO1998JP05369	申请日期	1998.11.30
申请人	EBARA CORPORATION;DAINICHI, SHOJI K.K.;RORZE CORPORATION;FUJII, TOSHIAKI;HORITA, OSAMU;OHYAMA, KOUJI;NAKAYAMA, TOSHIYA;SAKIYA, FUMIO;KIMPARA, MINEO;YOKOYAMA, SIN;HIROSE, MASATAKA	发明人	FUJII, TOSHIAKI;HORITA, OSAMU;OHYAMA, KOUJI;NAKAYAMA, TOSHIYA;SAKIYA, FUMIO;KIMPARA, MINEO;YOKOYAMA, SIN;HIROSE, MASATAKA
分类号	B65G49/00;B03C3/38;B65D81/26;B65D85/86;B65G49/07;H01L21/673;(IPC1-7):H01L21/68	主分类号	B65G49/00
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