发明名称 Making and testing an integrated circuit using high density probe points
摘要 Individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure.
申请公布号 US5225771(A) 申请公布日期 1993.07.06
申请号 US19910775324 申请日期 1991.10.11
申请人 DRI TECHNOLOGY CORP. 发明人 LEEDY, GLENN J.
分类号 G01R1/067;G01R1/073;G01R31/28;G01R31/316;G01R31/319;G03F7/20;G11C29/00;H01L21/66 主分类号 G01R1/067
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