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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
JPH05167003(A)
申请公布日期
1993.07.02
申请号
JP19910351992
申请日期
1991.12.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOMURO KATSUYA
分类号
H01L25/18;H01L25/04
主分类号
H01L25/18
代理机构
代理人
主权项
地址
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