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发明名称
VACUUM FILM FORMING APPARATUS
摘要
申请公布号
JPH05166732(A)
申请公布日期
1993.07.02
申请号
JP19910328853
申请日期
1991.12.12
申请人
NKK CORP;DAINIPPON INK & CHEM INC
发明人
ISHIZUKA HITOSHI;ONO MASARU;YAMATO MASAYUKI;KARIBAYASHI HIDEKI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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