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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH05167076(A)
申请公布日期
1993.07.02
申请号
JP19910331813
申请日期
1991.12.16
申请人
NEC KANSAI LTD
发明人
YAMAMOTO HIROTOMO
分类号
H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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