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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH05166482(A)
申请公布日期
1993.07.02
申请号
JP19910331752
申请日期
1991.12.16
申请人
NISSIN ELECTRIC CO LTD;NISSHIN HIGHTECH KK
发明人
MATSUDA KOJI;AOKI MASAHIKO
分类号
C23C14/48;H01J37/14;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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