| 摘要 |
PURPOSE:To improve safety by supplying gas component under lower pressure than a pressure of gas laser medium sealed in a sealed vessel through a tube from a gas supply unit, pressurizing the component under higher pressure than that of the medium sealed in the vessel on the way of the tube to be fed under pressure to the vessel. CONSTITUTION:A sealed vessel 1 sealed with laser medium to be excited by discharging is connected to a supply gas cylinder 19 through a first tube 13 and a second tube 17. Gas component for forming the medium is supplied from the cylinder 19 to the tube 17 under lower pressure than that of the medium sealed in the vessel 1. A bellows pump 16 is connected between the tubes 13 and 17 to pressurize the component supplied from the cylinder 19 to higher pressure than that of the medium sealed in the vessel 11, and fed under pressure to the vessel 11. Since the supplied component becomes higher than that only on a downstream side from pressurizing means, a high pressure part is reduced, and safety is improved. |
