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发明名称
COMPOUND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05166803(A)
申请公布日期
1993.07.02
申请号
JP19910335066
申请日期
1991.12.18
申请人
SUMITOMO ELECTRIC IND LTD
发明人
SAITO YOSHIHIRO
分类号
H01L21/318;H01L21/3205;H01L23/52
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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