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经营范围
发明名称
SEMICONDUCTOR PROCESSING EQUIPMENT
摘要
申请公布号
JPH05166739(A)
申请公布日期
1993.07.02
申请号
JP19910335080
申请日期
1991.12.18
申请人
KAWASAKI STEEL CORP
发明人
KASUGA HIROO
分类号
H01L21/22;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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