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发明名称
KATHODENZERSTAEUBUNGSPROZESS MIT HOCHTEMPERATURHEIZUNG.
摘要
申请公布号
DE3881284(D1)
申请公布日期
1993.07.01
申请号
DE19883881284
申请日期
1988.06.29
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
INOUE, MINORU HAINESU MIZONOKUCHI 213, KAWASAKI-SHI KANAGAWA 213, JP
分类号
C23C14/34;C23C14/35;C23C14/52;C23C14/54;H01J37/34;H01L21/203;H01L21/3205;(IPC1-7):C23C14/34;H01L21/31
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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