SENSOR ZUR MESSUNG DES STROMES ODER DER SPANNUNG VON AUF EINEM REFERENZSUBSTRAT VORHANDENEN ELEKTRISCH LEITENDEN SCHICHTEN.

摘要

Sensing device for measuring the current or voltage present in an electrically conductive coating being produced on a reference substrate comprises a substrate (1) arranged on a holder (16) via support platelets (6) and measuring platelets (10). The measuring platelets contact the substrate through conductor paths (2,3) fitted to the reference substrate. The platelets (10) in turn contact elements (17) connected to the measuring device (20) which monitor the current or voltage as the conductive coating is built up between conductor paths (2).