发明名称 LICHTELEKTRISCHE POSITIONSMESSEINRICHTUNG.
摘要 Two identical transparent diffraction gratings (2,2') are set a fixed distance apart. A collimated light source (7), e.g. an i.r. laser diode, produces a beam which impinges on one grating (2) at an angle (alpha) producing diffracted rays (3,4) with constant phase difference (theta) to reach a transparent Diffracted rays (6,7) intersect at the grating (2'). When one grating (5) is moved in one direction (X), rays (6,7) undergo a relative phase difference phi = 2 pi.X/g. The pairs of diffracted rays (8, 9), (10,11) then exhibit interference patterns and are measured in photoreceivers (12,13), whose current changes are related to movement X by equations solved by processing equipment.
申请公布号 DE3881379(D1) 申请公布日期 1993.07.01
申请号 DE19883881379 申请日期 1988.12.24
申请人 DR. JOHANNES HEIDENHAIN GMBH, 8225 TRAUNREUT, DE 发明人 SPIES, ALFONS, DIPL.-ING., W-8221 SEEBRUCK, DE
分类号 G01B11/02;G01D5/38;(IPC1-7):G01B11/02 主分类号 G01B11/02
代理机构 代理人
主权项
地址