| 摘要 |
PROBLEM TO BE SOLVED: To provide a peeling off method of an insulating green sheet capable of efficiently manufacturing the high quality insulating green sheet since the insulating green sheet can be peeled off from a release film without giving damage in a short time. SOLUTION: A vacuum absorbing table 17 having a suction plate 14 and an absorbing plate 13 is used as a vacuum suction device, the inside of the vacuum absorbing table is set to a pressure lower 15-45 mmHg than atmospheric pressure, an insulating green sheet 12 is brought into contact with a through hole, a pressing plate 18 is placed on the insulating green sheet so as to cover the whole part, the pressing plate is moved so that the insulating green sheet is gradually exposed, and at the same time the end of a release film is pulled upward so that an angle between the top surface of the vacuum absorbing table and the releasing film becomes 10-70 deg., and the insulating green sheet is sucked on an absorbing plate-like body.
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