发明名称 Electric arc evaporator.
摘要 <p>This invention concerning an electric arc evaporator including an anode (3), a support and a cathode system with a plurality of cathodes (1) to be evaporated, an electric conductor (4) and a screen (5) surrounding the periphery of the cathode. This electric arc vaporizer cathode system containes many cathodes placed in a chess-board pattern, into the common screen openings, each cathode having an electric conductor connected to a independent feeding source and a magnetic screen.</p>
申请公布号 EP0549545(A2) 申请公布日期 1993.06.30
申请号 EP19920830663 申请日期 1992.12.10
申请人 UNICOAT S.R.L. 发明人 BELLETTI, MANUELA
分类号 C23C14/24;C23C14/32;H01J37/32 主分类号 C23C14/24
代理机构 代理人
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