摘要 |
<p>This invention concerning an electric arc evaporator including an anode (3), a support and a cathode system with a plurality of cathodes (1) to be evaporated, an electric conductor (4) and a screen (5) surrounding the periphery of the cathode. This electric arc vaporizer cathode system containes many cathodes placed in a chess-board pattern, into the common screen openings, each cathode having an electric conductor connected to a independent feeding source and a magnetic screen.</p> |