| 摘要 |
PURPOSE:To enable the aberration of a lens to be measured accurately. CONSTITUTION:A title item is provided with a transmission-type phase grid 3, lighting systems 5, 7, 8, and 9 for illuminating the transmission-type phase grid 3 to a side of a mirror 1, a light-reception element 10 for performing photoelectric conversion of an illumination light which is returned through the transmission-type phase grid 3 after being reflected by the mirror 1 facing toward the mirror 1 from the transmission-type phase grid 3, and a detection part 4 for moving the transmission-type phase grid 3 before and after a direction of the mirror 1. A lens 2 to be inspected is placed between the mirror 1 and the transmission-type phase grid 3, thus enabling the transmission-type phase grid 3 to be scanned in parallel to a light axis of the lens 2 to be inspected. |
