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发明名称
THIN FILM DEPOSITION DEVICE AND MANUFACTURE OF SEMICONDUCTOR PRODUCTION DEVICE
摘要
申请公布号
JPH05163574(A)
申请公布日期
1993.06.29
申请号
JP19910330761
申请日期
1991.12.13
申请人
CANON INC
发明人
SHINDO HISASHI
分类号
B01J19/08;B01J19/12;C23C16/50;H01L21/02
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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