| 摘要 |
PURPOSE:To maintain sufficient working accuracy even in case of repeating polishing work without exchange of a polishing part. CONSTITUTION:In a microterritory polishing device in which a polishing shaft 9 is supported so as to perform micro-motion in two directions in parallel with a face to be polished 11a and meeting at right angles with each other and in the vertical direction against the face 11a, abrasives dispersing nonmagnetic abrasive grains in magnetic fluid is held between the extreme end polishing part 9a of the polishing shaft 9 and the face to be polished 11a by a magnetic field so as to polish the face 11a by micro-motion, a magnetic spherical body 14 is attracted by magnetic force to the extreme end of the polishing shaft 9 and rotatably held, and the magnetic spherical body 14 is made to act as the polishing part 9a. |
