发明名称 TFT LOAD TYPE SEMICONDUCTOR MEMORY CELL
摘要 PURPOSE:To provide a TFT load type semiconductor memory cell wherein the OFF current of a thin film transistor(TFT) is reduced. CONSTITUTION:This memory cell is equipped with a thin film transistor comprising a first insulating film 11 which has a projecting insulator 16a, and first conductive films (12 and 14) and second conductive films (14 and 12), with a second insulating film 13 as a middle layer, on the surface of the above first insulating film including the above projecting insulator.
申请公布号 JPH05160406(A) 申请公布日期 1993.06.25
申请号 JP19910324789 申请日期 1991.12.09
申请人 SONY CORP 发明人 KAYAMA SHIGEKI
分类号 H01L27/11;H01L21/8244;H01L29/78;H01L29/786 主分类号 H01L27/11
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