| 摘要 |
PURPOSE:To obtain an inspector for a circuit pattern which allows the improving of reliability of inspection results and yields of an acceptable substrate by removing dirts on a substrate prior to a precise reinspection of a defective substrate with an observer. CONSTITUTION:This apparatus has a first observer 13 to inspect the quality of a circuit pattern of a substrate 1, a computer 16 in which coordinates positions of defective points of the substrate 1 are registered as detected with the first observer 13, a second observer 21 to inspect the defective points precisely and a conveyor 17 which carries the substrate 1 to the second observer 21 from the first observer 13. Moreover, a moving table is provided to move the second observer 21 horizontally relative to the substrate 1 based on a command from the computer 16 to observe the defective points and a cleaning means is provided to clean the substrate 1 in conveying paths 12 and 17 of the substrate 1. In this manner, an inspector is built for the circuit pattern of the substrate. |
