| 摘要 |
PURPOSE:To enable an impurity to be inspected accurately according to a color data and at the same time a load for an inspector to be greatly reduced regardless of light intensity of a sample to be inspected. CONSTITUTION:A title item is provided with a color TV camera 2 which picks up an enlarged image of a sample to be inspected which is set to a stage of a microscope 1, an image input device 3 for latch an image data which is picked up by the TV camera, and a computer 4 which obtains a ratio where a color constituent of each impurity occupies for a total value of all color constituents of the impurity based on the image data which is input from the image input device 3. Furthermore, it is provided with a setter 5 which sets a range of an allowable value for a ratio of each color constituent which is obtained by this computer 4 and a CRT display 6 which judges presence or absence of impurity depending on whether the ratio of each color constituent of the impurity which is obtained by the operation part is within a range of allowable value which is set by the setter 5 and then performs its binary coding and displays the impurity. |
