| 摘要 |
PURPOSE:To improve reliability of a treatment device by a method wherein the remaining quantity in a treatment solution feeding container and the feeding condition are accurately observed and the collected amount and the state of recovery in a waste liquid recovering container are observed accurately. CONSTITUTION:The measured value LMa of the amount of a resist solution, i.e., the remaining quantity, contained in a resist solution containing bottle, is obtained from a resist solution residual quantity measuring part 62 on the basis of the measurement signal WA of analog sent from the weight sensor 48 carrying a resist solution containing bottle. On the other hand, the calculation value indicating the number of feeding of resist solution or the number of coating movement can be obtained from a counter 64, and the estimated value LMb of the residual quantity of the resist solution in the bottle can be obtained from a resist solution residual quantity estimation part 66. On a comparison decision part 72, the prescribed signal is given to a warning part 74 when either of the residual quantity measured value LMa and the residual quantity measured value LMa and the residual quantity estimation value LMb comes down to the residual quantity limit value, and a residual quantity alarm signal is generated. |
