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发明名称
THIN FILM FORMATION DEVICE
摘要
申请公布号
JPH05158008(A)
申请公布日期
1993.06.25
申请号
JP19910348680
申请日期
1991.12.04
申请人
NISSHA PRINTING CO LTD
发明人
MASAKI KENICHI
分类号
G02F1/13;G02F1/1333;G02F1/1337
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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