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发明名称
摘要
申请公布号
JPH0542136(B2)
申请公布日期
1993.06.25
申请号
JP19900054852
申请日期
1990.03.08
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OKUMURA KATSUYA
分类号
H05B3/20;H01L21/324;(IPC1-7):H01L21/324
主分类号
H05B3/20
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