DRY ETCHING METHOD,申请号JP19920043783-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH05160081(A)	申请公布日期	1993.06.25
申请号	JP19920043783	申请日期	1992.02.28
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	C23F4/00;H01L21/027;H01L21/30;H01L21/302;H01L21/3065;H01L21/308;H01L21/3213	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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