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发明名称
SEMICONDUCTOR FILM FORMING DEVICE
摘要
申请公布号
JPH05160039(A)
申请公布日期
1993.06.25
申请号
JP19910318090
申请日期
1991.12.02
申请人
CANON INC
发明人
OKADA SATOSHI
分类号
C23C26/00;H01L21/205;H01L21/285
主分类号
C23C26/00
代理机构
代理人
主权项
地址
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