| 摘要 |
<p>PURPOSE:To enable dust attached to the surface of a cleaning object to be removed at an optimal distance in a non-contact manner by a method wherein a dust remover is provided confronting the cleaning object in such a manner that it is able to move in parallel receding from or approaching to the cleaning object as it measures an approach distance between the tapered opening of a suction nozzle and the surface of the cleaning object. CONSTITUTION:A suction nozzle 1 is made to approach so as to be separate from a plate-like specimen alpha fixed onto a fixing jig 2 by a designated distance considering both a value which is indicated by a scale 3a marked on the side surface of a suction nozzle support table on a scale plate 7 which measures the height of the tapered opening 1a of a suction nozzle 1 and the thickness of the plate-like specimen alpha. Thereafter, a vacuum equipment connected to a vacuum pipe 8 is driven to remove dust on a surface region just under the tapered opening 1a of a suction nozzle 1 by sucking. Then, by operating rotary handles 5 and 6, the plate-like specimen alpha is made to move together with the fixing jig 2 both longitudinally and laterally on a horizontal plane under the suction nozzle 1. By this setup, a cleaning object can be cleaned without causing damage to its surface and protected against contamination caused by coming into contact with a suction nozzle.</p> |
