摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric conversion device which can easily be manufactured without dropping sensibility for detecting light from a visible area to an ultraviolet area. SOLUTION: The device is provided with a substrate 10, an epitaxial layer 12 formed by epitaxial growth on the main face of a substrate 10 side which is irradiated with the light of the and a plurality of diffusion layers 11 in which n-type of impurities are diffused in the epitaxial layer 12, which are in linear shapes in flat view and are arranged in parallel at prescribed intervals. Thus, pn-junction between the epitaxial layer 12 and the diffusion layer 11 can easily be formed to be wider than a conventional case. Consequently, current flows by the light of the short wavelength of the ultraviolet area between the diffusion layer 11 and the epitaxial layer 12 in the shallow area of the diffusion area 11. Spectral sensibility with respect to the ultraviolet area can be improved much more than the conventional case. Then, manufacture is easy since the plurality of diffusion layers 11 are formed in the almost linear shapes.
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