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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH05160089(A)
申请公布日期
1993.06.25
申请号
JP19910327188
申请日期
1991.12.11
申请人
FUJITSU LTD
发明人
HORIE HIROSHI;SUGIMOTO FUMITOSHI
分类号
H01L21/02;H01L21/304;H01L21/316;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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