发明名称 FINE PD WIRE FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To provide a fine Pd wire for semiconductor element composed of such Pd allay as causing no conventional trouble by improving sphericity and high temperature strength of ball within a predetermined compositional range. CONSTITUTION:The inventive fine Pd wire is composed of Pd added with one kind of 0.003-3at% of Ir, 0.003-1at% of Os or 0.003-1at% or Ru, total 2at% or mess or It, Os and/or Ru, or total 1at% or less of Os and Ru and containing inevitable impurities.
申请公布号 JPH05160186(A) 申请公布日期 1993.06.25
申请号 JP19910320427 申请日期 1991.12.04
申请人 TANAKA DENSHI KOGYO KK 发明人 IGA SUKEHITO;NAGAMATSU ICHIRO
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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