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发明名称
FORMATION OF MULTILAYER WIRING
摘要
申请公布号
JPH05160126(A)
申请公布日期
1993.06.25
申请号
JP19910347915
申请日期
1991.12.02
申请人
YAMAHA CORP
发明人
NAGURA MASAHIKO
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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