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发明名称
SEMICONDUCTOR DEVICE FAILURE DIAGNOSTIC METHOD
摘要
申请公布号
JPH05157820(A)
申请公布日期
1993.06.25
申请号
JP19910319550
申请日期
1991.12.04
申请人
NEC CORP
发明人
TAMETA SHIGEHITO
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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